Author:
Jung Hyun Soo,Hong Min-Sung,Lee Soo -Hun,Park June Ho,Kang Dongwoo,Lee Moon G.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference3 articles.
1. Chin Y. Poon and Bharat Bhushan, “Com-parison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler,”Wear. 190(1995)76–88.
2. S. T. Smith and D. G Chetwynd, Foundation of Ultraprecision Mechanism Design, University of Warwick, UK (1992). Private communication with CeBT Inc.
3. D. W. Kang, The Design and Test of Ultra-precision XY stage Using Leaf Spring Mechanism and Voice Coil Motor, Master Thesis, Dept. of Mech. Eng., KAIST, Korea (2003).
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