Development of Large Ultraprecision Mirror Surface Grinding System with Elid

Author:

Katahira Kazutoshi,Ohmori Hitoshi,Anzai Masahiro,Yamagata Yutaka,Makinouchi Akitake,Moriyasu Sei,Lin Weimin

Publisher

Kluwer Academic Publishers

Reference4 articles.

1. H. Ohmori and T. Nakagawa, Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing, Annals of the CIRP 1990; 39: 320.

2. H. Ohmori, Electrolytic In-Process Dressing (ELID) Grinding Technique for Ultra-Precision Mirror Surface Machining, Int.Journal of JSPE 1992; 26: 273.

3. H. Ohmori, Utilization of conditions in precision grinding with ELID (Electrolytic In-Process Dressing)for fabrication of hard material components, Ann. CIRP 1997; 46: 261–264

4. K. Katahira, H. Ohmori, M. Anzai, A. Makinouchi, S. Moriyasu, Y. Yamagata and W. Lin, Grinding Characteristics of Large Ultraprecision Mirror Surface Grinding System with ELID, Advances in Abrasive Technology 2000; The Society of Grinding Engineers; 125–128

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