Analysis of Ultraviolet Curing Effect on the Dielectric Constant and Molecular Structure of a Porous Dielectric Film-Reference-Cited by-同舟云学术

Analysis of Ultraviolet Curing Effect on the Dielectric Constant and Molecular Structure of a Porous Dielectric Film

Published:2010-06-12 Issue:10 Volume:39 Page:2337-2345
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Smith Ryan Scott,Tsui Ting,Ho Paul S.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-010-1297-y.pdf

Reference23 articles.

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3. S. Mehta, C. Dimitrakopoulos, R. Augur, J. Gambino, A. Chou, T. Hook, B. Linder, W. Tseng, R. Bolam, D. Harmon, D. Massey, and S. Gates, Mater. Res. S. C. V-21, 60 (2005).

4. M. Matsuura, K. Goto, N. Miura, S. Hashii, and K. Asai, Mater. Res. Soc. Symp. P. 914, 0914-F01-06 (San Francisco, April 2006).

5. K. Goto, S. Hashii, M. Matsumoto, N. Miura, T. Furusawa, M. Matsuura, A. Ohsaki, N. Ohara, N. Tsuji, and K. Mtsushita, Mater. Res. S. C. V-21, 30 (2005).

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