A test object with a line width less than 10 nm for scanning electron microscopy

Author:

Danilova M. A.,Mityukhlyaev V. B.,Novikov Yu. A.,Ozerin Yu. V.,Rakov A. V.,Todua P. A.

Publisher

Springer Science and Business Media LLC

Subject

Applied Mathematics,Instrumentation

Reference17 articles.

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2. D. N. Nyyssonen and M. T. Postek, Proc. SPIE, 565, 180 (1985).

3. M. T. Postek, J. Res. NIST, 99, 641 (1994).

4. Yu. A. Novikov and A. V. Rakov, Mikroelectronika, 25, No. 6, 417 (1996).

5. Yu. A. Novikov and A. V. Rakov, ibid., 426.

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