Borophosphosilicate glass films in silicon microelectronics, part 2: Structure and applications

Author:

Vasilev V. Y.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference52 articles.

1. Myuller, R.L., Solid-State Chemistry and the Vitreous State, in Khimiya tverdogo tela (Solid-State Chemistry), Leningrad: Leningr. Gos. Univ., 1965, pp. 9?63.

2. Nemilov, S.V., Thermodynamic and Kinetic Aspects of the Vitreous State, CRC, 1995, pp. 1?203.

3. Nekrasov, V.A., Osnovy obshchei khimii (The Fundamentals of General Chemistry), Moscow: Khimiya, 1973, vol. 2, pp. 9?12.

4. Boric Oxide, Boric Acid, and Borates, in Ullman?s Encyclopedia of Industrial Chemistry, VCH, 1991, vol. A4, 5th ed., pp. 263?280.

5. Boron Compounds, in Encyclopedia of Chemical Technology, New York: Wiley, 1992, vol. 4, 4th ed., pp. 36?418.

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