1. D. L. Spears and H. I. Smith, High-resolution pattern replication using soft x-rays, Electron. Lett
8, 102 (1972).
2. D. L. Spears and H. I. Smith, X-ray lithography—a new high resolution replication process, Solid State Technol. 15, 21–26 (1972).
3. E. Spiller, R. Feder, J. Topalian, D. Eastman, W. Gudat, and D. Sayre, X-ray microscopy of biological objects with carbon K and with synchrotron radiation, Science
191, 1172–1174 (1976).
4. G. Moore, Keynote Address, Kodak Microelectronics Seminar, Proceedings Interface-75, 2–5 (1976).
5. R. Feder, X-ray projection printing of electrical circuit patterns, IBM Report TR22. 1065, August 1970.