CMOS Integrated Organic Ciliary Actuator Arrays For General-Purpose Micromanipulation Tasks

Author:

Suh John W.,Darling R. Bruce,Böhringer Karl F.,Donald Bruce R.,Baltes Henry,Kovacs Gregory T. A.

Publisher

Springer US

Reference49 articles.

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2. Baltes, H. (1993). CMOS as sensors technology. Sensors and Actuators A (Physical), A37-A38:51–56.

3. Baltes, H. (1996). Future of IC microtransducers. Sensors and Actuators A (Physical), A56(1-2):179–192.

4. Berlin, A. A. and Gabriel, K. J. (1997). Distributed MEMS: New challenges for computation. IEEE Computer Science and Engineering, pages 17–29.

5. Bobbio, S. M., Kellam, M. D., Dudley, B. W., Goodwin-Johnasson, S., Jones, S. K., J. D. Jacobson, M. T., and DuBois, T. D. (1991). Integrated force arrays. In Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS), pages 74–79, Ft. Lauderdale, FL.

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