Author:
Soucy Gervais,Jurewicz Jerzy W.,Boulos Maher I.
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Reference17 articles.
1. G. Soucy, J. W. Jurewicz, and M. I. Boulos,Plasma Chem. Plasma Process. 1, 43 (1994).
2. G. Soucy, J. W. Jurewicz, and M. I. Boulos,Plasma Chem. Plasma Process. 1, 59 (1994).
3. Ceramic Research and Development in Japan;N. Kubo,1990
4. T. Yoshida, T. Tami, H. Nishimura, and K. Akashi,J. Appl. Phys. 54, 640 (1983).
5. T. Hussain and V. J. Ibberson, ?Synthesis of ultrafine silicon nitride in an r.f. plasma reactor,? ISPC-7, Eindhoven,2, 692 (1985).
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献