Hollow tube fabrication in photoresist film using continuous wave laser
Author:
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
http://link.springer.com/content/pdf/10.1007/s10043-011-0068-1.pdf
Reference5 articles.
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5. C. Egami, H. Tanaka, H. Mrakami, and S. Ota: Proc. SPIE 7522 (2009) 75225G.
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