Fabrication of an Integrated Mixing/Reaction Micro Flow Cell for μTAS

Author:

Yotsumoto A.,Nakamura R.,Shoji S.,Wada T.

Publisher

Springer Netherlands

Reference4 articles.

1. R. Miyake, T.S.J. Lammerink, M. Elwenspoek, J.H.J. Fluitman, Micro mixer with fast Diffusion, Proc. Micro Electro Mechanical Systems Workshop: MEMS-93, 1993, pp.248–253

2. U.D. Larsen, J. Branebjerg, G. Blankenstein, Fast mixing by parallel multilayer lamination, 2nd Int. Symp. on Micro Total Analysis Systems: μTAS96, 1996, pp.228–230

3. R.M. Moroney, R.m. White and R.T. Howe, Ultrasonically Induced Microtransport, proc. of IEEE Micro ElectroMechanical Systems, 1991, pp.277–282

4. V. Lehmann, Porous silicon — a new material for MEMS, Proc. Micro Electro Mechanical Systems Workshop: MEMS-96, 1996, pp. 1–6

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4. Development of a Microfabricated Biochemical Workbench — Improving the Mixing Efficiency —;Micro Total Analysis Systems ’98;1998

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