Publisher
Springer International Publishing
Reference31 articles.
1. Albersdörfer A, Elender G, Mathe G, Neumaier K R, Paduschek P, Sackmann E (1998) High resolution imaging microellipsometry of soft surfaces at 3 μm and 5 Å normal resolution. Appl Phys Lett 72:2930–2932
2. Azzam RMA, Bashara NM (eds) (1977) Ellipsometry and polarized light. North Holland Publishing Company, New York
3. Erman M, Theeten JB (1986) Spatially resolved ellipsometry. J Appl Phys 60:859–873
4. Gold N, Willenborg DL, Opsal J, Rosencwaig A (1989) High resolution ellipsometric apparatus. US Patent #5042951
5. Herman IP (ed) (1996) Optical diagnostics for thin film processing. Academic, San Diego