Porous Silicon Formation by Metal Nanoparticle-Assisted Etching
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-04508-5_5-1
Reference137 articles.
1. Asoh H, Arai F, Ono S (2007a) Site-selective chemical etching of silicon using patterned silver catalyst. Electrochem Commun 9(4):535–539
2. Asoh H, Arai F, Ono S (2007b) Micropatterning of silicon by chemical etching using patterned noble metals as catalyst. ECS Trans 6(2):431–437
3. Asoh H, Sakamoto S, Ono S (2007c) Metal patterning on silicon surface by site-selective electroless deposition through colloidal crystal templating. J Colloid Interface Sci 316(2):547–552
4. Asoh H, Arai F, Uchibori K, Ono S (2008) Pt-Pd-embedded silicon microwell arrays. Appl Phys Expr 1(6):067003/1–067003/3
5. Asoh H, Arai F, Ono S (2009) Effect of noble metal catalyst species on the morphology of macroporous silicon formed by metal-assisted chemical etching. Electrochim Acta 54:5142–5148
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