1. G.L. Fowler, J. Vac. Sci. Technol. A5, 390 (1987)
2. W.F. Egelhoff Jr, J. Vac. Sci. Tech. A6, 2584 (1988)
3. Viton A is a copolymer between vinylidine fluoride and hexafluoropropylene with the formula [-FC(CF3)-CF2-CH2-CF2-]n. Initial outgassing evolves water, oxygen, hydrogen, nitrogen, and some hydrocarbons (most prominent mass peak at 43 amu, probably from C2F+). After bakeout, the main gas observed was water [2]
4. R.S. Barton, R.R. Govier, J. Vac. Sci. Technol. 2, 113 (1965)
5. N. Yoshimura, J. Vac. Sci. Technol. A7, 110 (1989)