Author:
Grutzik Scott J.,Zehnder Alan T.
Publisher
Springer International Publishing
Reference22 articles.
1. Bhushan, B., Murarka, S.P., Gerlach, J.: J. Vac. Sci. Tehcnol. B 8, 1068 (1990)
2. Alan, T., Hines, M.A., Zehnder, A.T.: Appl. Phys. Lett. 89, 091901 (2006)
3. Alan, T., Zehnder, A.T., Sengupta, D., Hines, M.A.: Appl. Phys. Lett. 89, 231905 (2006)
4. Namazu, T., Isono, Y., Tanaka, T.: In: The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, pp. 205–210 (2000)
5. Tsuchiya, T., Tabata, O., Sakata, J., Taga, Y.: J. Microelectromech. Syst. 7, 106–113 (1998)