Porous Silicon Micromachining Technology
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-71381-6_79
Reference37 articles.
1. Astrova EV, Nechitaĭlov AA (2008) Electrochemical etching of macropores in silicon with grooved etch seeds. Semiconductor 42:746–751
2. Astrova EV, Nechitailov AA, Tolmachev VA, Melnikov VA, Perova TS (2009) Photo-electrochemical etching of macro-pores in silicon with grooves as etch seeds. Phys Stat Solid A 206(6):1235–1239
3. Astrova EV, Tolmachev VA, Fedulova GV, Melnikov VA, Ankudinov AV, Perova TS (2010) Optical properties of one-dimensional photonic crystals fabricated by photo-electrochemical etching of silicon. Appl Phys A 98:571–581
4. Barillaro G, Pieri F (2005) A self-consistent theoretical model for macropore growth in n-type silicon. J Appl Phys 97:116105
5. Barillaro G, Strambini LM (2010) Controlling macropore formation in patterned n-type silicon: existence of a pitch-dependent etching current density lower bound. Electrochem Commun 12:1314–1317
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