Author:
Belikov A. E.,Kuznetsov O. V.,Sharafutdinov R. G.
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Reference29 articles.
1. A. R. Reinberg, Annu. Rev. Mater. Sci. 9, 341 (1979).
2. C. Deshpandey and R. F. Bunshah, Thin Solid Films 163, 131 (1988).
3. R. A. Gottscho and T. A. Miller, Pure Appl. Chem. 56, 189 (1984).
4. R. W. Dreyfus, J. M. Jasinski, G. S. Selwyn, and R. E. Walkup, Laser Focus/ElectroOptics 62, December (1986).
5. M. Venugopalan and R. Avni, “Analysis of glow discharges for understanding the process of film formation,” in Thin Films from Free Atoms and Particles, K. J. Klabunde, ed., Academic Press, New York (1985), p. 49.