Film deposition in a radial flow reactor by plasma polymerization of hexamethyldisilazane

Author:

Gerstenberg K. W.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Colloid and Surface Chemistry,Polymers and Plastics,Physical and Theoretical Chemistry

Reference27 articles.

1. Yasuda H (1985) Plasma Polymerization, Academic Press, Orlando

2. Bell AT (1980) in: Plasma Chemistry III, Vol 94 in Topics in Current Chemistry. Veprek S, Venugopalan M (eds) Springer Verlag, Berlin, p 43

3. Gerstenberg KW, Schön D (1987), Beschichten durch Plasmapolymerisation, Kap. 2.3.5 in: Handbuch der Fertigungstechnik, Band 4 eds.: Spur G, Stöferle Th, Hanser Verlag

4. Gerstenberg KW, Proceedings of First Intern Conf on Plasma Surface Eng 1988, Garmisch-Partenkirchen, 1988, p 185

5. Niinomi M, Yanagihara K in: eds.: Shen M, Bell AT, Plasma Polymerization, ACS Symposium Series 108, p 87

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