Design, fabrication, and testing of a MEMS microturbine

Author:

Jeon Byung Sun,Park Kun Joong,Jin Song Seung,Joo Young Chang,Min Kyoung Doug

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Reference15 articles.

1. Aichlmayr, H T, Kittelson, D B and Zachanah, M R, 2002, “Micro-Homogeneous Charge Compression Ignition (HCCI) Combustion Investigations Employing Detailed Chemical Kinetic Modeling and Experiments,”the Western States Section of the Combustion Institute, Spring Technical Meeting, La Jolla, CA, 26

2. Ayon, A A, Braff, R, Lin, C C, Sawin, H H and Schmidt, M A, 1999, “Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher,”Journal of the Electrochemical Society, Vol 146, No 1, pp 339–346

3. Barber, R W and Emerson, D R, 2002, “The Influence of Knudsen Number on the Hydro-dynamic Development Length within Parallel Plate Micro-Channels,” WIT Press, Southampton, UK,Advances in Fluid Mechanics IV, pp 207–216

4. Ehrich, F F and Jacobson, S A, 2001, “Development of High-Speed Gas Bearings for High -Power-Density Micro-Devices,”ASME Turbo Expo 2001, 2001-GT-0478

5. Feinandez-Pello, C, Liepmann, D and Pisano, A, 2003, MEMS Rotary Combustion Laboratory, University of California at Berkeley http//www.me.berkeley.edu/mrcl

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