Physical Vapor Deposition

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Springer US

Reference30 articles.

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3. Herman, Marian A. and Sitter, Helmut, Molecular Beam Epitaxy: Fundamentals and Current Status. Berlin: Springer, 1996.

4. Yamashita, T.; Tomita, T.; and Sakurai, T.; Calculations of molecular beam flux from liquid source.” Jpn. J. Appl. Phys, 1987; 26: 1192-1193.

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