Study of microwave components for an electron cyclotron resonance source: Simulations and performance
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s12046-014-0259-0.pdf
Reference35 articles.
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3. Baskaran R, Jain S K and Ramamurthi S S 1996 A compact coaxial electron cyclotron resonance plasma source. Rev. Sci. Instrum. 67: 1243–1245
4. Baskaran R 1997 Double window configuration as a low cost microwave waveguide window for plasma applications. Rev. Sci. Instrum. 68: 4424–4426
5. Celona L, Ciavola G and Gammino S 1998 Study of microwave coupling ECR ion sources and microwave ion sources. Rev. Sci. Instrum. 69: 1113–1115
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