The Incredible Shrinking IC: Part 3 BEOL Aluminum Alloy Single and Multilevel Metal

Author:

Tigelaar Howard

Publisher

Springer International Publishing

Reference22 articles.

1. Chapter 4 Programmable Logic Devices, in Integrated Circuit Engineering Corporation, DocPlayer, pp. 1–18, https://docplayer.net/54982636-Programmable-logic-devices.html

2. Process Technology History—Intel, WikiChip Chips and Semi, https://en.wikichip.org/wiki/intel/process . Accessed 4 Mar 2020

3. Intel Microprocessor Quick Reference Guide, https://www.intel.com/pressroom/kits/quickrefyr.htm . Accessed 4 Mar 2020

4. A. Ayub, Class Slides—Deposition Processes (Thin Films)—CVD & PVD (Institute of Nano Electronic Engineering, Institute of Nano Electronic Engineering, Universiti Malaysia Perlis, Arau)., http://portal.unimap.edu.my/portal/page/portal30/Lecture%20Notes/KEJURUTERAAN_MIKROELEKTRONIK/Semester%201%20Sidang%20Akademik%2020132014/EMT%20357%20-%20Fundamental%20of%20Microelectronic%20Fabrication/Lecture%20Notes/Deposition%20Process%20Technology.pdf

5. Construction Analysis—AMD/Vantis MACHL V EEPLA, ICE Report SCA 9709-554, http://docplayer.net/40707559-Amd-vantis-machl-v-eepla.html

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