Determination of Fabrication Parameters for Fabrication of FOTURAN® II Glass Applied in Micro-channel Cooling System
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-030-91892-7_69
Reference6 articles.
1. Dietrich, T.R., Ehfeld, W., Lacher, M., Kramer, M., Speit, B.: Fabrication technologies for microsystems utilizing photoetchable glass. Microelectron. Eng. 30, 497–504 (1996)
2. Kim, J.: Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers. J. Micro/Nanolithogr. MEMS MOEMS 3(3), 478 (2004). https://doi.org/10.1117/1.1759330
3. Fernández-Pradas, J.M., Serrano, D., Morenza, J.L., Serra, P.: Microchannel formation through Foturan® with infrared femtosecond and ultraviolet nanosecond lasers. J. Micromech. Microeng. 21(2), 025005 (2011). https://doi.org/10.1088/0960-1317/21/2/025005
4. Anthony, C.J., Docker, P.T., Jiang, K.C.: Microfabrication in FOTURAN photosensitive glass using focused ion beam. In: Proceedings of the World Congress on Engineering, Vol. II (2007)
5. Tolke, R., Hutter, A.B., Evans, A., Rupp, J.M., Gauckler, L.J.: Processing of Foturan glass ceramic substrates for micro-solid oxide fuel cells. J. Eur. Ceram. Soc. 32, 3229–3238 (2012)
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