Patterning Nanoelectronic Devices Using Field Emission Scanning Electron Microscope
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Publisher
Springer Nature Switzerland
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-42775-6_31
Reference9 articles.
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2. Broers, A.: Combined electron and ion beam processes for microelectronics. Elec. Reliab. 4, 103. Pergamon Press (1965). https://doi.org/10.1016/0026-2714(65)90267-2
3. Dragoman, M., Dinescu, A., Dragoman, D.: 2D Materials nanoelectronics: new concepts. Fabrication, characterization from microwaves up to optical spectrum. Phys. Stat. Sol. (A), 216(8) (2019). https://doi.org/10.1002/pssa.201800724
4. Jing, X., et al.: Engineering field effect transistors with 2D semiconducting channels: status and prospects. Adv. Funct. Mater. 30(18) (2020). https://doi.org/10.1002/adfm.201901971
5. Dragoman, M., Dinescu, A., Dragoman, D.: Negative differential resistance in graphene based ballistic field-effect transistor with oblique top gate. Nanotechnology 25 (2014). https://doi.org/10.1088/0957-4484/25/41/415201
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