In-Sensor System for Real-Time Compensation of Thermal Drift in MEMS Pressure Sensors-Reference-Cited by-同舟云学术

In-Sensor System for Real-Time Compensation of Thermal Drift in MEMS Pressure Sensors

Published:2023-11-29 Issue: Volume: Page:186-191
ISSN:1876-1100
Container-title:Lecture Notes in Electrical Engineering
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Author:

Vitolo Paola^ORCID,Licciardo Gian Domenico^ORCID,Liguori Rosalba^ORCID,Di Benedetto Luigi^ORCID,Rubino Alfredo^ORCID,Pau Danilo^ORCID,Pesaturo Massimo^ORCID

Publisher

Springer Nature Switzerland

Link

https://link.springer.com/content/pdf/10.1007/978-3-031-48711-8_21

Reference15 articles.

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2. Vitolo, P., Pau, D., Licciardo, G.D., Pesaturo, M., Bosco, S., Pennino, S.: Tiny compensation of pressure drift measurements due to long exposures to high temperatures. In: 2023 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), pp. 01–05 (2023). https://doi.org/10.1109/I2MTC53148.2023.10175998

3. Licciardo, G.D., et al.: Ultra-tiny neural network for compensation of post-soldering thermal drift in mems pressure sensors. In: 2023 IEEE International Symposium on Circuits and Systems (ISCAS), pp. 1–5 (2023). https://doi.org/10.1109/ISCAS46773.2023.10181480

4. Ipc/jedec j-std-020c, moisture/reflow sensitivity classification for non-hermetic solid state surface mount devices. JEDEC Standards (2004)

5. STMicroelectronics: High-performance mems nano pressure sensor: 260–1260 hpa absolute digital output barometer. LPS22HH datasheet (2019)