The structure of Mo/Si multilayers prepared in the conditions of ionic assistance-Reference-Cited by-同舟云学术

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The structure of Mo/Si multilayers prepared in the conditions of ionic assistance

Published:2007-11-21 Issue:4 Volume:90 Page:705-710
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Zubarev E.N.,Kondratenko V.V.,Sevryukova V.A.,Yulin S.A.,Feigl T.,Kaiser N.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-007-4337-6.pdf

Reference20 articles.

1. M.B. Stearns, C.-H. Chang, D.G. Stearns, J. Appl. Phys. 71, 187 (1992)

2. X.W. Zhou, H.N.G. Wadley, J. Appl. Phys. 84, 2301 (1998)

3. A. Patelli, V. Rigato, G. Salmaso, N.J.M. Carvalho, J.T.M. De Hosson, E. Bontempi, L.E. Depero, Surf. Coat. Technol. 201, 143 (2006)

4. R.E. Somekh, J. Vac. Sci. Technol. A 2, 1285 (1984)

5. J. Birch, F. Eriksson, G.A. Johansson, H.M. Hertz, Vacuum 68, 275 (2003)

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