Author:
Velichko O. I.,Kavaliova A. P.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Reference26 articles.
1. P.A. Stolk, H.-J. Gossmann, D.J. Eaglesham, D.C. Jacobson, C.S. Rafferty, G.H. Gilmer, M. Jaraiz, J.M. Poate, H.S. Luftman, T.E. Haynes, J. Appl. Phys. 81, 6031–6050 (1997)
2. S.C. Jain, W. Schoenmaker, R. Lindsay, P.A. Stolk, S. Decoutere, M. Willander, H.E. Maes, J. Appl. Phys. 91, 8919–8940 (2002)
3. L. Shao, J. Liu, Q.Y. Chen, W.-K. Chu, Mater. Sci. Eng. R 42, 65–114 (2003)
4. T. Philippe, S. Duguay, D. Mathiot, D. Blavette, J. Appl. Phys. 109, 023501 (2011)
5. International Technology Roadmap for Semiconductors: Front End Processes, p. 36 (2011). http://www.itrs.net/Links/2011ITRS/Home2011.htm