Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing
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Published:2021-08-10
Issue:9
Volume:127
Page:
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ISSN:0947-8396
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Container-title:Applied Physics A
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language:en
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Short-container-title:Appl. Phys. A
Author:
Sena HadiORCID, Tanaka Atsushi, Wani Yotaro, Aratani Tomomi, Yui Toshiki, Kawaguchi Daisuke, Sugiura Ryuji, Honda Yoshio, Igasaki Yasunori, Amano Hiroshi
Funder
Ministry of Internal Affairs and Communications
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Reference41 articles.
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