New Copolymers of Dialkyl Fumarates with Norbornene Derivatives for Sub-0.2 µm Lithography at a Wavelength of 193 nm: Synthesis and Thermal and Photochemical Transformations-Reference-Cited by-同舟云学术

New Copolymers of Dialkyl Fumarates with Norbornene Derivatives for Sub-0.2 µm Lithography at a Wavelength of 193 nm: Synthesis and Thermal and Photochemical Transformations

Published:2005-09 Issue:1-3 Volume:404 Page:159-161
ISSN:0012-5016
Container-title:Doklady Physical Chemistry
language:en
Short-container-title:Dokl Phys Chem

Author:

Vainer A. Ya.,Dyumaev K. M.,Eremina L. A.,Tamarkina R. V.,Ternovskii E. P.,Shvartsburg L. M.

Publisher

Springer Science and Business Media LLC

Subject

Physical and Theoretical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s10634-005-0049-9.pdf

Reference15 articles.

1. Hibbs, M., Kunz, R., and Rotschild, M., Solid State Technol., 1995, vol. 38, no.7, pp. 69–78.

2. Reichmanis, E., Nalamasu, O., Houlihan, F.M., et al., J.Vac. Sci. Technol., 1997, vol. 15, no.6, pp. 2528–2533.

3. Allen, R.D., Wallow, T.I., Opitz, J., et al., J. Photopolym. Sci. Technol., 1998, vol. 11, no.3, pp. 475–480.

4. Crivello, J.V. and Shim, S.-Y., J. Polym. Sci.: Polym. Chem. Ed., 1995, vol. 33, no.3, pp. 513–523.

5. Vainer, A.Ya., Dosovitskaya, I.E., Dyumaev, K.M., and Kulikova, L.V., Khim. Fiz., 1998, vol. 17, no.2, pp. 94–98.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Soluble cyclopolymers based on 1,1,2,3,3-pentafluoro-4-(1,1,1,3,3,3-hexafluoro-2-hydroxy-2-propyl)-1,6-heptadiene: Synthesis and chemical transformations;Doklady Chemistry;2010-11

2. Synthesis and thermal and photochemical transformations of copolymers of norbornene derivatives with carboxyl and nitrile side groups;Doklady Physical Chemistry;2006-10