Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Cited by
98 articles.
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1. Industrial Laser Systems;Tailored Light 2;2023-10-05
2. Optics and Apparatus for Excimer Laser/EUV Microprocessing;Handbook of Laser Micro- and Nano-Engineering;2021
3. Optics and Apparatus for Excimer Laser/EUV Microprocessing;Handbook of Laser Micro- and Nano-Engineering;2020
4. Sonderverfahren;Dubbel Taschenbuch für den Maschinenbau 2: Anwendungen;2020
5. Laser Micromachining of Engineering Materials—A Review;Micro and Nano Machining of Engineering Materials;2018-09-27