Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings
Author:
Publisher
International Association Welding
Subject
Mechanical Engineering
Reference15 articles.
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3. 3. Liu, D., Ruan, C.F., Zhang, P. et al. (2021) Structural, interface texture and toughness of TiAlN/CN multilayer films. Materials Characterization, 178, 111301. doi:10.1016/j. matchar.2021.111301
4. 4. Vyas, A., Shen, Y., Zhou, Z., Li, K. (2008) Nano-structured CrN/CNx multilayer films deposited by magnetron sputtering. Composites Science and Technology, 68(14), 2922-2929. doi:10.1016/j.compscitech.2007.11.002
5. 5. Nishimura, H., Umehara, N., Kousaka, H., Tokoroyama, T. (2016) Clarification of relationship between friction coefficient and transformed layer of CNx coating by in-situ spectroscopic analysis. Tribology International, 93, 660-665. doi:10.1016/j.triboint.2014.12.015
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